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Image Search Results
Journal: Microsystems & Nanoengineering
Article Title: A toroidal SAW gyroscope with focused IDTs for sensitivity enhancement
doi: 10.1038/s41378-024-00658-9
Figure Lengend Snippet: a A lift-off process is used to manufacture the required structures. Micrograph of b the SAW gyroscope. c Zoomed-in image of the FIDTs and SAW reflectors. d Zoomed-in view of the metallic pillars, FIDTs, and electrodes
Article Snippet: To better reveal the formation principle of standing waves, a finite element model of the
Techniques:
Journal: Microsystems & Nanoengineering
Article Title: A toroidal SAW gyroscope with focused IDTs for sensitivity enhancement
doi: 10.1038/s41378-024-00658-9
Figure Lengend Snippet: a Using the open-loop test scheme, amplitude‒frequency curves with various input voltages in the driving mode and sensing mode can be obtained. b Time-domain signals and frequency-domain signals obtained by the gyroscope in the driving mode and sensing mode under a closed-loop test. c Rotational angular velocity—amplitude output curve of the SAW gyroscope and its fitting residuals. d Allan deviation of the SAW gyroscope
Article Snippet: To better reveal the formation principle of standing waves, a finite element model of the
Techniques: